Inhoudsopgave
Advertenties
MSA
Interfererende
stof
Stikstofdioxide
Fosfine
Silaan
Zwaveldioxide
Trichloor-
ethyleen
ND = geen data
Interfererende stof
Aceton
Acetyleen
Ammoniak
Arsine
Benzeen
Broom
Koolstofdioxide
Koolstofdisulfide
Koolmonoxide
Chloor
Diboraan
Ethyleen
Ethylalcohol
Ethyloxide
Ether
Fluor
Freon 12
Germanium
Hexaan
Waterstof
Waterstofchloride
NL
Concentra-
HCN HCL
tie [ppm]
5
ND
0.5
ND
5
ND
10
-0.3
1000
ND
Concentra-
GeH
tie [ppm]
1000
ND
12000
ND
25
ND
1
1
20
ND
2
ND
5000
ND
15
0
100
0
5
ND
20
5
50
1
100
ND
10
ND
400
ND
5
ND
1000
0
1
1
500
ND
500
0
50
ND
ULTIMA XL/ULTIMA XT
ClO
HF
2
0
0.2
2.5
2
0
ND
7
0
ND
0
0
2.7
ND
0
ND
B
H
Br
F
3
2
6
2
2
ND
0
0
ND
0
0
ND
0
0
5
0
0
ND
0
0
ND
2
12
ND
0
0
0
0
0
0
0
0
ND
4
10
20
0
0
2
0
0
ND
0
0
ND
ND ND
ND
0
0
ND
2
5
0
0
0
5
0
0
ND
0
0
0
0
0
ND
0
0
Specificaties
PH
ASH
SiH
3
4
4
ND
ND
ND
0.5
1
0.7
0.1
0.2
5
0.5
1
2
ND
ND
ND
NH
NH
EtO
3
2
ND
ND
ND
ND
ND
ND
25
ND
0
ND
ND
ND
ND
ND
ND
ND
ND
ND
0
0
ND
ND
ND
ND
0
2
ND
0
0
0
ND
ND
ND
0
40
ND
ND
ND
0
ND
ND
10
ND
ND
ND
ND
ND
ND
0
0
0
ND
ND
ND
ND
ND
ND
ND
500
0
0
0
ND
87
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