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Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
August, 2017
1-7 Description
All manuals and user guides at all-guides.com
Brooks
The VDM300 is a self-contained, ultra-high purity vapor delivery module
providing precise, low flow deionized (DI) water vapor for high purity
applications such as microelectronics manufacturing. Utilizing a heated,
all-welded titanium vapor tank with automated level-sensing and filling, the
VDM300 produces vapor flow in a non-superheated vapor stage to reduce
the aggressive effects of DI water. Vapor flow is controlled by an integrated
Brooks Instrument high temperature thermal mass flow controller. The
mass flow sensor is a high stability flow sensor compatible with the
elevated internal temperatures found in the VDM300.
The result is a highly accurate, robust and responsive vapor delivery
module for challenging conditions.
• High temperature capability ensures reliable delivery of condensable
gases and precursors
• Digital measurement and control enhances accuracy (±1% of setpoint
>10% FS) and repeatability (±0.2% F.S.)
• Ultra-high purity vapor flow path ensures integrity and purity of the gas/vapor
• Ultra-stable flow sensor reduces maintenance resulting in superior
uptime and lower cost of ownership (COO)
• All metal diaphragm-free control valve design optimizes reliability
Ultra High Purity Flow Path
• The mass flow controllers are constructed with a 10μ in Ra max surface finish.
• Overall reduced surface area and un-swept volumes for faster dry-down
during purge steps
• Long-term sensor and device stability for maximum yield and throughput
Ultra High Purity Process Connections
VDM300 supports all metal seal/UHP industry gas connection interface
standards for full OEM and process coverage.
• DI Water Inlet: ¼" VCR Male or ¼" tube compression fitting
• DI Water Vapor Outlet: 3/8-½" VCR Male fitting
• Tank Drain: 1/8" Instant Tube fitting
Analog & Digital Interfaces
The VDM300 supports analog input/output of 0-5 volt dc, TTL (0-5 Vdc)
digital controls and alarms or optionally up to 24 Vdc when using an
external power supply, a USB diagnostic port, and EtherCAT
communications. Analog and digital controls are transmitted via the 15-pin
D-subminiature connector. Reference Table 2-1 for pin assignments. USB
digital communication is transmitted via the micro-USB diagnostics port.
Optional EtherCAT digital communication is transmitted via the dual RJ-45
connectors. Reference Supplemental Manual for Brooks Instrument
EtherCAT for VDM300 Series (X-DPT-VDM300-EtherCAT) for EtherCAT
assignments and Supplemental Manual for Brooks Instrument Brooks
Expert Support Tool (X-SW-BEST-eng) for diagnostic port communication.
Section 1 Introduction
®
VDM300 Vapor Delivery Module
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