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Section 1 Introduction
®
Brooks
VDM300 Vapor Delivery Module
1-8 Specifications for VDM300 Devices (See Table 1-2)
Table 1-2 Specifications for Standard VDM300
Performance Specifications
Performance Specifications
Performance Specifications
Performance Specifications
Performance Specifications
Full Scale Ranges (H
Full Scale Ranges (H
Full Scale Ranges (H
Full Scale Ranges (H
Full Scale Ranges (H
O) O) O) O) O)
2 2 2 2 2
Turndown Ratio
Turndown Ratio
Turndown Ratio
Turndown Ratio
Turndown Ratio
Step Response Time
Step Response Time
Step Response Time
Step Response Time
Step Response Time
Accuracy
Accuracy
Accuracy
Accuracy
Accuracy
Linearity
Linearity
Linearity
Linearity
Linearity
Repeatability
Repeatability
Repeatability
Repeatability
Repeatability
Temperature Coefficient
Temperature Coefficient
Temperature Coefficient
Temperature Coefficient
Temperature Coefficient
Valve Shutdown
Valve Shutdown
Valve Shutdown
Valve Shutdown
Valve Shutdown
Electrical
Electrical
Electrical
Electrical
Electrical
Communication
Communication
Communication
Communication
Communication
Connections
Connections
Connections
Connections
Connections
Input Signals
Input Signals
Input Signals
Input Signals
Input Signals
Output Signals
Output Signals
Output Signals
Output Signals
Output Signals
Power
Power
Power
Power
Power
Diagnostic Port
Diagnostic Port
Diagnostic Port
Diagnostic Port
Diagnostic Port
Mechanical
Mechanical
Mechanical
Mechanical
Mechanical
Fittings
Fittings
Fittings
Fittings
Fittings
Weight
Weight
Weight
Weight
Weight
Mounting Orientation
Mounting Orientation
Mounting Orientation
Mounting Orientation
Mounting Orientation
Environmental
Environmental
Environmental
Environmental
Environmental
Maximum Outlet Pressure
Maximum Outlet Pressure
Maximum Outlet Pressure
Maximum Outlet Pressure
Maximum Outlet Pressure
DI Water Supply Pressure
DI Water Supply Pressure
DI Water Supply Pressure
DI Water Supply Pressure
DI Water Supply Pressure
DI Water Quality
DI Water Quality
DI Water Quality
DI Water Quality
DI Water Quality
N N N N N
Purge Pressure
Purge Pressure
Purge Pressure
Purge Pressure
Purge Pressure
2 2 2 2 2
Ambient
Ambient
Temperature Range
Temperature Range
Ambient Temperature Range
Ambient
Ambient
Temperature Range
Temperature Range
Humidity
Humidity
Humidity
Humidity
Humidity
Certifications
Certifications
Certifications
Certifications
Certifications
Electromagnetic Compatibility
Electromagnetic Compatibility
Electromagnetic Compatibility
Electromagnetic Compatibility
Electromagnetic Compatibility
Low Voltage
Low Voltage
Low Voltage
Low Voltage
Low Voltage
RoHS
RoHS
RoHS
RoHS
RoHS
REACH
REACH
REACH
REACH
REACH
SEMI E54.20-1108
SEMI E54.20-1108
SEMI E54.20-1108
SEMI E54.20-1108
SEMI E54.20-1108
1. All performance specifications apply only in the ready state, ready light on.
Special conditions for safe use:
Special conditions for safe use:
Special conditions for safe use:
Special conditions for safe use:
Special conditions for safe use:
A. To ensure full EMC protection the ferrite core included with the device (Wurth Electronics Inc Part Number 74271131 ) must be installed to the control cable.
B. To ensure full EMC protection a shielded AC power cable and a shielded control cable (<30 m. length) must be supplied by the user.
1-4
All manuals and user guides at all-guides.com
1 1 1 1 1
±1.0% of setpoint (> 10% full scale); ±0.2% of full scale (5-10% full scale setpoint)
Fully compliant to Directive 2014/30/EU (EN: 61326-1:2013)
Fully compliant to Directive 2014/35/EC (EN: 61010-1:2010)
Standard for Sensor/Actuator Network Communication for EtherCAT
Installation and Operation Manual
Description
Description
Description
Description
Description
3000 sccm
20:1
≤ 2 seconds (±2% of setpoint)
±0.5% of full scale
±0.2% of full scale
0.05% F.S. per °C (zero and span)
<0.5% F.S. (water vapor)
Analog or EtherCAT
15-pin D-Sub and dual RJ-45
Flow setpoint (0 to 5 Vdc)
Start up/drain
Flow output (0 to 5 Vdc)
Ready to use
DC: ±15 Vdc ±5% @ 1.2 amp
AC: 230 Vac, 50/60 Hz, 290 watts nominal
Micro USB
See Model Code for list
Dry: 15lbs Wet: 16lbs
Vertical (inlet down)
200 Torr
10 to 40 psig (20 psig recommended)
UHP: ≥18 mega ohm-cm
10 to 40 psig (20 psig recommended)
15°C to 45°C
0 to 95% RH, non-condensing
Fully compliant to Directive 2011/65/EU
Fully compliant to Directive EC 1907/2006
X-VAP-VDM300-eng
Part Number: 541B210AAG
August, 2017
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