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Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
August, 2017
Paragraph
Number
1-1
Introduction ................................................................................................................................ 1-1
1-2
How To Use This Manual ........................................................................................................... 1-1
1-3
Product Support References ...................................................................................................... 1-2
1-4
Warning, Caution and Notice Statements .................................................................................. 1-2
1-5
Product Warranty ....................................................................................................................... 1-2
1-6
Glossary of Terms and Acronyms .............................................................................................. 1-2
1-7
Description ................................................................................................................................. 1-3
1-8
Specifications for VDM300 Devices ........................................................................................... 1-4
1-9
Overview of VDM300 Device Enclosure .................................................................................... 1-5
1-10
Internal Layout of VDM300 and Basic Function ......................................................................... 1-9
1-11
Dimensions of VDM300 Device Enclosure ............................................................................... 1-10
Section 2 Installation
2-1
General ...................................................................................................................................... 2-1
2-2
Receipt of Equipment ................................................................................................................. 2-1
2-3
Recommended Storage Practice ............................................................................................... 2-2
2-4
VDM300 Mounting and Orientation ............................................................................................ 2-2
2-5
Mechanical Connections ............................................................................................................ 2-2
2-5-1 Inlet Connections ....................................................................................................................... 2-4
2-5-2 Outlet Connections ..................................................................................................................... 2-4
2-6
Electrical Connections ................................................................................................................ 2-5
2-7
Diagnostic Port Connection ........................................................................................................ 2-8
2-8
Return Shipment ........................................................................................................................ 2-8
2-9
Transit Precautions .................................................................................................................... 2-8
2-10
Removal From Storage .............................................................................................................. 2-8
2-11
Product Safety Information ......................................................................................................... 2-9
Section 3 Startup
3
Operation ................................................................................................................................... 3-1
3-1
Idle Mode ................................................................................................................................... 3-1
3-2
Normal Mode .............................................................................................................................. 3-1
3-2-1 Start-up (Normal Mode) .............................................................................................................. 3-2
3-2-2 Ready-to-Use (Normal Mode) .................................................................................................... 3-3
3-2-3 Zeroing the VDM300 .................................................................................................................. 3-3
3-2-3-1 Procedure for Manually Zeroing the VDM300 ............................................................................ 3-4
3-3
Drain Mode ................................................................................................................................. 3-4
3-4
Operation of BEST for VDM300 ................................................................................................. 3-5
Section 4 Maintenance and Troubleshooting
4
Maintenance and Troubleshooting ............................................................................................. 4-1
4-1
Introduction ................................................................................................................................ 4-1
4-2
Routine Maintenance ................................................................................................................. 4-1
4-3
Troubleshooting the VDM ........................................................................................................... 4-2
4-4
General Troubleshooting Guide ................................................................................................. 4-3
4-5
Using BEST as a Diagnostic Tool ............................................................................................... 4-4
4-6
VDM300 Removal ...................................................................................................................... 4-8
4-7
VDM300 Packaging ................................................................................................................... 4-8
4-8
VDM300 Shipping ...................................................................................................................... 4-8
All manuals and user guides at all-guides.com
Brooks
®
VDM300 Vapor Delivery Module
Contents
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