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Section 1 Introduction
®
Brooks
VDM300 Vapor Delivery Module
1-3 Product Support References
1-4 Warning, Caution and Notice Statements
1-5 Product Warranty
1-6 Glossary of Terms and Acronyms
1-2
All manuals and user guides at all-guides.com
Refer to www.BrooksInstrument.com for Brooks sales and service
locations and to obtain other documents that support the VDM300 Series.
Those documents include:
• Brooks VDM300 data sheet (DS-VAP-VDM300-eng)
• Supplemental Manual for Brooks
Series (X-DPT-EtherCAT-VDM300-eng; part number: 541B217AAG)
• Supplemental Manual for Brooks Instrument Expert Support Tool
(X-SW-BEST-eng; part number 541B197AAG)
Warning, caution and notice statements are located throughout this manual
in ANSI format.
A WARNING statement indicates a potentially hazardous situation which, if
not avoided, COULD result in death or serious injury.
A CAUTION statement indicates a potentially hazardous situation which, if
not avoided, MAY result in minor or moderate injury. It may also be used to
alert against unsafe practices.
A NOTICE statement describes specific information that requires special
attention.
Product warranty information can be found on the back cover of this
manual and on the Brooks website at www.BrooksInstrument.com. This
information provides general warranty information, limitations, disclaimers,
and applicable warranty periods according to product group.
(Refer to Table 1-1)
Table 1-1 Terms and Acronyms
Term/ Acronym
Definition
BEST
Brooks Expert Support Tool (GUI)
COO
Cost of Ownership
DIW
Deionized Water
DSP
Digital Signal Processor
EtherCAT
Ethernet for Control Automation Technology is an open high
performance Ethernet-based fieldbus system
F.S.
Full scale
GUI
Graphical user interface (refer to BEST)
IEC
International Electrotechnical Commission
LA
Link Active
LED
Light-emitting diode
MFC
Mass flow controller
PID
Proportional Integral Derivative
PDC
Product description code
PSID
Pounds per square inch differential
PSIG
Pounds per square inch gauge
RH
Relative humidity
RJ-45
Standard type of connector for network cables featuring eight
pins to which the wire strands of a cable interface electrically
SDS
Safety data sheet
S.P.
Setpoint
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
®
Instrument EtherCAT for VDM300
August, 2017
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