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Section 2
Installation
®
Brooks
VDM300 Vapor Delivery Module
2-5-1 Inlet Connections
2-5-2 Outlet Connections
2-4
All manuals and user guides at all-guides.com
Dl Water & Nitrogen lnlet: The VDM300 can be ordered with a 1/4" VCR
male fitting or a 1/4" tube compression fitting. This inlet is where the Dl
water source is connected for normal operation, or where the nitrogen
source is connected when draining the VDM300. It is up to the user to
make sure that the proper source is available for the particular mode of
operation desired.
NOTE: The inlet pressure for both fluid sources must be between 10-40
psig for proper operation.
Tank Drain: The VDM300 has a 1/8" lnstant Tube Fitting. This is the port
where the water will drain out of the tank of the VDM300.Make sure that
the 1/8" drain tube is properly connected to this port when draining the
tank. Leave this drain line permanently connected as repeated coupling
and uncoupling can cause unnecessarily damage the tubing.
Vapor Outlet: The VDM300 has a 1/2" VCR male fitting for this
connection. The VDM300 is designed to deliver vapor into a vacuum so be
sure that the connection to the tool will remain at or below 200 Torr during
normal operation.
It is highly recommended that a shutoff valve be installed downstream of
the VDM300 to isolate it during device zeroing.
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
August, 2017
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