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Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
August, 2017
4 Maintenance and Troubleshooting
4-1 Introduction
4-2 Routine Maintenance
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Brooks
VDM300 maintenance is discussed below in three areas: Routine
Maintenance, Troubleshooting and MFC Removal/Packing/Shipping.
Any precision unit such as a vapor delivery module requires occasional
servicing, especially if it has been operating for an extended period of time.
It is recommended that you send the device to a Brooks Service Center for
cleaning and recalibration at 12 month intervals.
Please follow the instructions for removal, product packaging and product
return instructions found in Sections 4-6 thru 4-8.
All active process instrumentation and equipment is subject to aging and
wear from their environment. This includes temperature, mechanical
stress, component tolerance shift, contaminant buildup, oxidation, and
other influences. The effects are gradual, but over time the changes can
affect the accuracy of even the best equipment. Therefore, it is
recommended to drain and refill the DIW tank every 3 months to prevent
non-volatile contaminant build-up in the DIW tank and to re-zero the device
at 6 month intervals as a minimum. Refer to Section 3-3 for draining
instructions. Refer to Section 3-2-3 for re-zeroing instructions.
Maintenance and Troubleshooting
®
VDM300 Vapor Delivery Module
Section 4
4-1
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