Inhoudsopgave
Advertenties
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
August, 2017
1-1 Introduction
1-2 How To Use This Manual
All manuals and user guides at all-guides.com
Brooks
The VDM300 is a self-contained, ultra-high purity vapor delivery module
providing precise, low flow deionized (DI) water vapor for high purity
applications such as microelectronics manufacturing. Utilizing a heated, all-
welded titanium vapor tank with automated level-sensing and filling, the
VDM300 produces vapor flow in a non-superheated vapor stage to reduce
the aggressive effects of DI water. Vapor flow is controlled by an integrated
Brooks Instrument high temperature thermal mass flow controller. The
thermal mass flow controller is a high stability flow sensor compatible with
the elevated internal temperatures found in the VDM300.
Figure 1-1 VDM Vapor Delivery Module
This manual is intended to provide the user with all the information
necessary to install, operate, troubleshoot and maintain this vaporizer. The
manual is organized in the following sections:
Section 1 Introduction
Section 2 Installation
Section 3 Operation
Section 4 Maintenance and Troubleshooting
Section 5 Product Description Code
Appendix A Essential Instructions
Warranty, Local Sales/Service Contact Information
It is recommended that this manual be read in its entirety before attempting
to operate or repair these devices.
Section 1 Introduction
®
VDM300 Vapor Delivery Module
1-1
Advertenties
Inhoudsopgave
