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Section 1 Introduction
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
®
Brooks
VDM300 Vapor Delivery Module
August, 2017
Figure 1-3 Front View Details of the VDM300 LED Indicators
Figure 1-3 (above) shows a detailed view of the switches and indicators
located on the front of the VDM300. The following is a description of each
switch and indicator.
ZERO: This is a momentary detent switch that activates a zeroing function
to remove any zero offset that may have accumulated over time during
normal VDM300 operation. Refer to the section called VDM300 Zeroing
later in this manual for information on when and how to use this function
properly.
DEVICE READY: (Green LED)This indicates when the VDM300 is Ready-
to-Use (RTU). lt also serves as an indicator when a drain cycle is complete
(blinkíng).
WARM UP: (Amber LED)This indicates when the VDM300 is warming up
(solid) or at the desired temperature (blinking).
DEVICE FAULT: (Red LED) This indicates an alarm/fault condition.
ECAT ERR: (Red LED) Indicates EtherCAT error status. See the
Supplemental Manual for Brooks Instrument EtherCAT for VDM300 Series
( X-DPT-VDM300-EtherCAT) for details on the various states.
ECAT ID: These three 16-position rotary switches (X100, X10 and X1) are
used to set the serial address for the VDM300 device in EtherCAT
communication networks. The three switches create a 3-digit address as in
the following example: if the X100 switch is set to "A", the X10 switch to "5"
and the X1 to "B", the serial address would be "A5B".
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