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Section 1 Introduction
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
®
Brooks
VDM300 Vapor Delivery Module
August, 2017
C. EtherCAT: This connection is a dual RJ-45 connection. This connection
allows the user to send commands and set points and receive flow and alarm
signals from the VDM300 utilizing an EtherCAT network. See Figure 1-4.
D. Power Entry Module: The power entry module is used to connect AC
power to the VDM300 tank heaters. See Section 1-13 VDM300 lnternal
Layout and Basic Function for more details about the tank heaters. The
VDM300 is configured to accept 230 VAC power, provided by the end user,
via a shielded AC power cord with an IEC C-13 connector.
The power entry module consists of 3 main features as follows:
a. The AC input plug is a standard IEC C-14 connector where AC power
can be connected to the VDM300.
b. The ON/OFF switch for switching AC power to the VDM300 tank heaters
on or off.
c. The fuse drawer holds two 250V 3A fuses to protect the AC tank heaters.
E. Dl Water lnlet: This is where the Dl water supply is to be connected by
the end user. The fitting is either a 1/4" VCR Male fitting or a 1/4"
compression tube fitting depending on the configuration ordered. Ensure
the DI water source is equal to or better than UHP (≥ 18 mega ohm-cm).
This is also where a nitrogen gas supply is to be connected for the purpose
of draining the VDM300. See Section 2-5-1 Inlet Connections for more
details and instructions on how to connect Dl water and/or N2 to the inlet.
F. Tank Drain: This is a 1/8" lnstant Tube Fitting. This is the outlet through
which the Dl water is drained from the tank. See Section 1-10 VDM300
lnternal Layout and Basic Function for more details about the tank.
1-8
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