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Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
August, 2017
1-10 Internal Layout of VDM300 and Basic Function
Figure 1-5 VDM300 Block Diagram
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Brooks
Figure 1-5 below illustrates the internal layout of the VDM300 system. The
VDM300 has a titanium tank inside that serves as a reservoir for Dl water
and a Mass Flow Controller (MFC).The Dl water is heated to the vapor
state in the tank through the use of heaters attached to the tank and a
heater control system along with the vacuum outlet pressure. The liquid
water level is monitored by a level detection system (not shown in diagram)
in the tank. The MFC delivers the appropriate amount of Dl water vapor on
demand through the Dl water vapor outlet. The fill valve controls the flow of
Dl water into the tank which works in tandem with the level detection
system to maintain the optimal amount of liquid Dl water in the tank for
vaporization during operation. The tank drain controlled by the drain valve
allows the tank to be emptied for maintenance and extended periods of
downtime.
Section 1 Introduction
®
VDM300 Vapor Delivery Module
1-9
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