®
R&S
ATS1000
Inhoud
1 Inleiding.................................................................................................. 7
1.1
1.1.1
CE-verklaring.................................................................................................................. 7
1.1.2
1.1.3
China RoHS-certificering.................................................................................................8
1.2
Documentatie Overzicht............................................................................................... 8
1.2.1
Instructies Handboek...................................................................................................... 8
1.2.2
Configuratiehandleiding.................................................................................................. 8
1.2.3
1.2.4
1.2.5
1.2.6
Help.................................................................................................................................9
1.3
Conventies.....................................................................................................................9
2 Veiligheid...............................................................................................11
2.1
Beoogd gebruik........................................................................................................... 11
2.2
Restrisico's.................................................................................................................. 11
2.3
2.4
2.5
Stickers op de Kamer................................................................................................. 15
3 Noodgevallen........................................................................................17
3.1
Noodstop..................................................................................................................... 17
4 Overzicht Machine............................................................................... 18
4.1
Vergrendelingssystemen............................................................................................24
4.2
DUT-uitlijningslasers.................................................................................................. 25
4.3
Positioner.....................................................................................................................26
4.3.1
5.1
5.2
Verpakking................................................................................................................... 30
5.3
Vervoer......................................................................................................................... 33
Instructies Handboek 1179.2983.30 ─ 02
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3